FOCUS electronics

Instruments for Electron Spectroscopy and Surface Analytics

Spot Profiles                                             top: measured beam profile of the EFM 3 bottom: same for EFM 4 in both cases the largest aperture has been used                       Calculated beam diameter for EFM 3, EFM 4 and EFM 3T (5, 4 and 3mm aperture)                         Rear view of EFM 3/4