Instruments for Electron Spectroscopy and Surface Analytics

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Fine Focus RHEED Gun RG15


The FOCUS RHEED gun RG15 is an electron gun that can be used for electron diffraction of high energetic electrons or for other types of electron based surface analysis (e.g. Auger-electron spectroscopy).

The FOCUS RHEED gun is designed to open a new field of High Energy Electron Diffraction surface analysis. The field of application includes standard RHEED for MBE studies and similar topics as well as the sophisticated Spot Profile Analysis RHEED (SPA-RHEED).

It allows the production of a highly focused,parallel and well current and position stabilized electron beam down to 10µm spot diameter. This provides the prerequisites of the highly angular resolved method of SPA-RHEED. Further it includes (optional) a double octople deflector for perfect scanning of the beam impact angle (beam rocking) or its position on the sample. The Focus RG15 is not a high current source because this is not compatible with the fine focus performance and the use of a channel electron mutiplier for performing the spot profile analysis at the detector side.

The source allows easy operation and simple maintenance. The beam producing part is designed for quick customer filament replacement and beam readjustments.

A well vented source housing together with the additional differential pumping port is supporting optimal system pressures during gun operation.


Specifications

Electron Source power supply/ Electron beam control

Energy

0 .. -15kV, max. 250mA

Filament

0.1 .. 2.5 A, max. 7V, referenced to Energy voltage

Extractor / Grid0

-50V in reference to Energy voltage

Focus

0 .. 100% of energy voltage

Suppressor

-100V .. +100 in reference to Energy voltage

Case

19 inch rackmount

Width

19"

Height

3U (132.5mm)

Depth

540 mm

Weight

21 kg

Electron Beam Control power supply

Deflection

+1kV..-1kV

Lens

0 .. 250 mA, max. 30V

Octopole A/Bmax.

+/- 2.5kV

Case

19 inch rackmount

Width

19"

Height

6U (132.5mm)

Weight

500 mm

 

24 kg


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