Instruments for Electron Spectroscopy and Surface Analytics

FOCUS electronics

SPA-RHEED Application Examples RHEED on Si(100) 2x1 Energy 8kV 2 dimensional scan with 20ms dwelltime at each point.       1 dimensional scan parallel to the shadow edge. The center spot is the (00)-spot. Data courtesy D. Grützmacher, O. Kirfel, B. Müller, PSI Villigen     Energy resolved spotprofiles of the (00)-beam at the primary energy and two different losses, as indicated by the arrows.