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SPA-RHEED Software

Instruments for Electron Spectroscopy and Surface Analytics

SPA-RHEED

Spot Profile Analysis RHEED


The SPA-RHEED is an instrument for spot profile and energy analysis of diffracted electrons . An octupole deflector in front of an aperture is used to scan the diffracted electron pattern. A suppressor electrode behind the aperture suppresses secondary electrons. A second octupole was added to the electron gun RG15. This enable one to independently choose the incident and final angle at the sample, thus defining the momentum transfer of the electrons.
A k-space resolved measurement of reflected electrons is then possible.
The electron energy analyser CSA200HV is placed behind the aperture to performe EELS- spectroscopy of the diffracted electrons.

The SPA-RHEED system is operated with the power supplies Electron Source, Electron Beam Control and Analyser Control.

The system consists of:

  • The RHEED gun RG15 with a double octopole-deflector. The electron beam is focussed onto the screen or detector. It can be rocked by the double octopole-deflector to give different angles of incidence onto the sample without sample rotation.
  • The deflector double octopole. Electrons starting at the sample with definite angles are deflected in a way that they reach the aperture parallel to the detector’s axis. This gives a reproducible transmission of all electrons through the suppressor optics.
  • The detector that is mounted on a retraction mechanism. The detector can be retracted to directly observe the RHEED patterns or extended for automatically recording of RHEED spots or scans in reciprocal space.
    The detector consists of:
  • the aperture wheel to select the angle resolution,
  • the suppressor electrode that either suppresses secondary electrons or focusses the electrons onto the entrance slit of the deflector,
  • the "in line" channeltron for electron detection in SPA-modus and
  • the 90°-deflector to deflect the electron into the electron energy analyser
  • The transfer lens that focusses the electrons from the exit slit of the deflector onto the entrance slit of the energy analyser.
  • The electron energy analyser CSA200 HV

All parts of the ELS-SPA-RHEED system are fully mu-metal shielded. To gain best resolution and stability the sample region must also be shielded to reduce AC and DC magnetic fields.

References:
B. Müller, M. Henzler, Rev. Sci. Instr. 66 (1995) 5232
B. Müller, V. Zielsack, Phys. Rev. Lett. 79 (1997) 4393


Specifications

Electron Source

RHEED- gun RG15

Electron energy analyser

CSA200 HV

Analysers mounting

DN CF100, rotatable

Detector

"in line" channeltron, mounted on a retraction mechanism. Gain: 10E8 in pulse-counting mode.

Mounting of detector with retraction mechanism

DN CF150

Aperture Ų

2 mm, 300 µm, 100 µm, 30 µm and 10 µm .

Suppressor cutoff energy (varies with the aperture size).

>1.5 eV

Magnetic shielding

mu metal

Bakeout temperature

180°C

Orientation

any

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 


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