Measured deposition parameters

Deposition area measurements:

Spotprofile EFM346

EFM 3:
Flat top diameter 10mm (Nozzle - sample distance 90mm, Mo-crucible 8mm diameter)
EFM 4:
Flat top diameter 36mm (Nozzle - sample distance 90mm, Mo-crucible 8mm diameter)
EFM 6:
Flat top diameter 36mm (Nozzle - sample distance 40mm, Mo-crucible XXXL)


Deposition area vs. distance to sample:

SPOT_DIA

Deposition area as a function of distance for three different aperture sizes for EFM 3, EFM 4 and EFM 3T.


Evaporant temperature depending on crucible size and heating power:

T_CRUC

Crucible temperatures for different crucible sizes with three typical e-beam energies.
For this measurement Mo-crucibles were used.




For more information see the related brochure.download