Small Spot Ion Source FOCUS FDG150

- Technical data -

Energy range . . . . . . . . . . . . . . . . . . . . 10 eV to 5 keV
Beam current at low energies . . . . . . . . . 100nA @ 15 eV
Beam diameter . . . . . . . . . . . . . . . . . . < 150μm @ 5 keV and 30 mm working distance
Total beam current . . . . . . . . . . . . . . . . up to 10 μA
Current density . . . . . . . . . . . . . . . . . . > 2 mA/cm² @ 5keV

Maximum raster area . . . . . . . . . . . . . . 7x7mm² @ 5kV and 30 mm working distance
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10x10mm² @ 5kV and 50 mm working distance

Raster frame correction . . . . . . . . . . . . . Keystone correction
Raster schemes . . . . . . . . . . . . . . . . . . .Internal raster generator;
input sockets for external scanning

Differential pumping port . . . . . . . . . . . .DN40CF
Working distance . . . . . . . . . . . . . . . . . .>30mm optimum performance at WD 30 mm
Insertion depth . . . . . . . . . . . . . . . . . . . 224 mm
Mounting flange size . . . . . . . . . . . . . . . .DN40CF


Control electronics ISC 5K:

Fully digitally controlled power supply for FDG150 with front panel control and display of all relevant parameters
on board digital scan & deflection processor with an
implemented (user adjustable) keystone correction algorithm
x-y input for optional use of an external scan generator
electron emission current stabilization
ion current stabilization by means of pressure regulation with a digital closed loop regulator
remote control via TCP/IP interface protocol is supported


Conformities:
CE conformity, produced according to the WEEE and RoHS EU directives.


downloadDownload of our recent product flyer (pdf).