Hot Filament Ion Source FOCUS FDG 15

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The FDG 15 ion source is designed to clean samples for surface analysis, to perform simple depth profiling, to act as an excitation source for ISS/LEIS experiments and optionally to provide slow ions (< 15 eV) e.g. for charge neutralization in ESCA.

An extremely clean ion beam is ensured by a non line-of-sight filament, a gas inlet directly into the ionization cage and an effective differential pumping.
The ionization is done by electron bombardment to allow for a continuous variable beam current from the nA to μA regime.

A dedicated ion focusing optics allows to reduce the spot size down to 300µm for sputtering of small crystals and to adapt for large working distances up to 300 mm.

The power supply can be fully controlled by the front panel or via a TCP/IP interface. An ease of use LabVIEW
TM* – based PC software is provided.

The source and the power supply can be upgraded with a regulated gas inlet in combination with a closed loop regulation for long time stabilization of the ion current.
Another upgrade option is the low energy mode that generates < 15 eV ions e.g. for charge neutralization in ESCA.

For dedicated depth profiling the
FDG 150, an extended version of the FDG 15 is available.

* LabVIEW™ is a trade mark of National Instruments

CE conformity, produced according to the WEEE and RoHS EU directives.

downloadDownload of our recent product flyer (pdf).